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ELC 200 Radio Frequency RF/High Vacuum HV
Credit Hours:  3
Effective Term: Fall 2013
SUN#: NA
AGEC: (None)  
Credit Breakdown: 2 Lectures, 3 Labs
Times for Credit: 1
Grading Option: A/F
Cross-Listed:


Description: High vacuum and plasma systems to manufacture semiconductor devices, process foods, surface hardening, compact disk production and film deposition.

Prerequisites: Sophomore and instructor consent

Corequisites: None

Recommendations: None

Measurable Student Learning Outcomes
1. (Application Level) Explain, apply and demonstrate knowledge of OSHA safety procedures necessary when working with high vacuum and plasma systems.
2. (Evaluation Level) Identify major safety precautions that must be observed when working with high vacuum and plasma systems and delineate the possible consequences, per instructor's guidelines.
3. (Comprehension Level) Explain the operation and pressure range of various types of vacuum pumps.
4. (Comprehension Level) Explain the function and use of various materials and hardware, such as gauges, flanges and multi-port connectors.
5. (Application Level) Demonstrate leak detection procedures in a high vacuum system.
6. (Evaluation Level) Identify, evaluate and discuss the major safety precautions that must be observed when working with high power RF sources, transmission lines and matching networks attached to high vacuum plasma systems, necessary when working with high power RF transmission and plasma systems.
7. (Comprehension Level) Explain the theory of operation of PI and L matching networks and how these networks facilitate the coupling of RF from the generator to the plasma load in the vacuum chamber.
8. (Comprehension Level) Explain the theory of operation and use of transmission lines and impedance matching networks.
9. (Comprehension Level) Discuss the troubleshooting procedure for RF sources and matching networks, including the SWR meter and dummy load checking.
10. (Evaluation Level) Evaluate, demonstrate and discuss the use of a standing wave ratio (SWR) meter and dummy load to check RF power sources and matching networks.
Internal/External Standards Accreditation
OSHA: www.osha.gov