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MET 291 Basic Nanotechnology Processes
Credit Hours:  3
Effective Term: Fall 2017
SUN#: None
AGEC: None  
Credit Breakdown: 2 Lectures, 3 Labs
Times for Credit: 1
Grading Option: A, B, C, D, F

Description: A hands-on introduction to the processing involved in "top down," "bottom up," and hybrid nanofabrication. Included is a step-by-step description of the equipment, facilities processes, and the process flow needed to fabricate devices and structures. Prerequisite: MET290.

Prerequisites: MET290

Corequisites: None

Recommendations: None

Measurable Student Learning Outcomes
1. (Knowledge Level) Identify and define the differences and applications of "top down" and "bottom up" manufacturing.
2. (Evaluation Level) Define the importance of controlled environments for nanotechnology manufacturing and evaluate a site.
3. (Synthesis Level) Identify potential contamination issues in nanotechnology, explain techniques for preventing contamination and create a plan to maintain a contaminant-free environment.
4. (Application Level) Define, explain and demonstrate contamination removal methods.
5. (Knowledge Level) Define applications of colloidal chemistry to nanotechnology.
6. (Analysis Level) Analyze and explain the importance of surface adhesion and delamination.
7. (Analysis Level) Analyze etch features and quantify etch rates.
8. (Evaluation Level) Identify and evaluate process parameters for plasma enchanced chemical vapor deposition.
9. (Comprehension Level) Identify and explain process parameters for low pressure chemical vapor deposition.
Internal/External Standards Accreditation
Nanotechnology Standards: ASTM URL: http://www.astm.org/Standards/nanotechnology-standards.html